diff --git a/sql/catalyst/src/main/scala/org/apache/spark/sql/catalyst/normalizer/NormalizeCTEIds.scala b/sql/catalyst/src/main/scala/org/apache/spark/sql/catalyst/normalizer/NormalizeCTEIds.scala
new file mode 100644
index 0000000000000..1b1b526e78140
--- /dev/null
+++ b/sql/catalyst/src/main/scala/org/apache/spark/sql/catalyst/normalizer/NormalizeCTEIds.scala
@@ -0,0 +1,54 @@
+/*
+ * Licensed to the Apache Software Foundation (ASF) under one or more
+ * contributor license agreements.  See the NOTICE file distributed with
+ * this work for additional information regarding copyright ownership.
+ * The ASF licenses this file to You under the Apache License, Version 2.0
+ * (the "License"); you may not use this file except in compliance with
+ * the License.  You may obtain a copy of the License at
+ *
+ *    http://www.apache.org/licenses/LICENSE-2.0
+ *
+ * Unless required by applicable law or agreed to in writing, software
+ * distributed under the License is distributed on an "AS IS" BASIS,
+ * WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied.
+ * See the License for the specific language governing permissions and
+ * limitations under the License.
+ */
+
+package org.apache.spark.sql.catalyst.normalizer
+
+import org.apache.spark.sql.catalyst.plans.logical.{CacheTableAsSelect, CTERelationRef, LogicalPlan, UnionLoop, UnionLoopRef, WithCTE}
+import org.apache.spark.sql.catalyst.rules.Rule
+
+object NormalizeCTEIds extends Rule[LogicalPlan]{
+  override def apply(plan: LogicalPlan): LogicalPlan = {
+    val curId = new java.util.concurrent.atomic.AtomicLong()
+    plan transformDown {
+
+      case ctas @ CacheTableAsSelect(_, plan, _, _, _, _, _) =>
+        ctas.copy(plan = apply(plan))
+
+      case withCTE @ WithCTE(plan, cteDefs) =>
+        val defIdToNewId = withCTE.cteDefs.map(_.id).map((_, curId.getAndIncrement())).toMap
+        val normalizedPlan = canonicalizeCTE(plan, defIdToNewId)
+        val newCteDefs = cteDefs.map { cteDef =>
+          val normalizedCteDef = canonicalizeCTE(cteDef.child, defIdToNewId)
+          cteDef.copy(child = normalizedCteDef, id = defIdToNewId(cteDef.id))
+        }
+        withCTE.copy(plan = normalizedPlan, cteDefs = newCteDefs)
+    }
+  }
+
+  def canonicalizeCTE(plan: LogicalPlan, defIdToNewId: Map[Long, Long]): LogicalPlan = {
+    plan.transformDownWithSubqueries {
+      // For nested WithCTE, if defIndex didn't contain the cteId,
+      // means it's not current WithCTE's ref.
+      case ref: CTERelationRef if defIdToNewId.contains(ref.cteId) =>
+        ref.copy(cteId = defIdToNewId(ref.cteId))
+      case unionLoop: UnionLoop if defIdToNewId.contains(unionLoop.id) =>
+        unionLoop.copy(id = defIdToNewId(unionLoop.id))
+      case unionLoopRef: UnionLoopRef if defIdToNewId.contains(unionLoopRef.loopId) =>
+        unionLoopRef.copy(loopId = defIdToNewId(unionLoopRef.loopId))
+    }
+  }
+}
diff --git a/sql/catalyst/src/main/scala/org/apache/spark/sql/catalyst/plans/logical/v2Commands.scala b/sql/catalyst/src/main/scala/org/apache/spark/sql/catalyst/plans/logical/v2Commands.scala
index 72274ee9bf174..fab64d771093f 100644
--- a/sql/catalyst/src/main/scala/org/apache/spark/sql/catalyst/plans/logical/v2Commands.scala
+++ b/sql/catalyst/src/main/scala/org/apache/spark/sql/catalyst/plans/logical/v2Commands.scala
@@ -1742,7 +1742,8 @@ case class CacheTableAsSelect(
     isLazy: Boolean,
     options: Map[String, String],
     isAnalyzed: Boolean = false,
-    referredTempFunctions: Seq[String] = Seq.empty) extends AnalysisOnlyCommand {
+    referredTempFunctions: Seq[String] = Seq.empty)
+  extends AnalysisOnlyCommand with CTEInChildren {
   override protected def withNewChildrenInternal(
       newChildren: IndexedSeq[LogicalPlan]): CacheTableAsSelect = {
     assert(!isAnalyzed)
@@ -1757,6 +1758,10 @@ case class CacheTableAsSelect(
       // Collect the referred temporary functions from AnalysisContext
       referredTempFunctions = ac.referredTempFunctionNames.toSeq)
   }
+
+  override def withCTEDefs(cteDefs: Seq[CTERelationDef]): LogicalPlan = {
+    copy(plan = WithCTE(plan, cteDefs))
+  }
 }
 
 /**
diff --git a/sql/core/src/main/scala/org/apache/spark/sql/internal/BaseSessionStateBuilder.scala b/sql/core/src/main/scala/org/apache/spark/sql/internal/BaseSessionStateBuilder.scala
index 00c9a26cb5bf3..040733294423c 100644
--- a/sql/core/src/main/scala/org/apache/spark/sql/internal/BaseSessionStateBuilder.scala
+++ b/sql/core/src/main/scala/org/apache/spark/sql/internal/BaseSessionStateBuilder.scala
@@ -23,6 +23,7 @@ import org.apache.spark.sql.catalyst.analysis.{Analyzer, EvalSubqueriesForTimeTr
 import org.apache.spark.sql.catalyst.analysis.resolver.ResolverExtension
 import org.apache.spark.sql.catalyst.catalog.{FunctionExpressionBuilder, SessionCatalog}
 import org.apache.spark.sql.catalyst.expressions.{Expression, ExtractSemiStructuredFields}
+import org.apache.spark.sql.catalyst.normalizer.NormalizeCTEIds
 import org.apache.spark.sql.catalyst.optimizer.Optimizer
 import org.apache.spark.sql.catalyst.parser.ParserInterface
 import org.apache.spark.sql.catalyst.plans.logical.LogicalPlan
@@ -403,6 +404,7 @@ abstract class BaseSessionStateBuilder(
   }
 
   protected def planNormalizationRules: Seq[Rule[LogicalPlan]] = {
+    NormalizeCTEIds +:
     extensions.buildPlanNormalizationRules(session)
   }
 
diff --git a/sql/core/src/test/scala/org/apache/spark/sql/CachedTableSuite.scala b/sql/core/src/test/scala/org/apache/spark/sql/CachedTableSuite.scala
index 12d26c4e195f1..880d8d72c73e7 100644
--- a/sql/core/src/test/scala/org/apache/spark/sql/CachedTableSuite.scala
+++ b/sql/core/src/test/scala/org/apache/spark/sql/CachedTableSuite.scala
@@ -2598,6 +2598,44 @@ class CachedTableSuite extends QueryTest with SQLTestUtils
     }
   }
 
+  test("SPARK-46741: Cache Table with CTE should work") {
+    withTempView("t1", "t2") {
+      sql(
+        """
+          |CREATE TEMPORARY VIEW t1
+          |AS
+          |SELECT * FROM VALUES (0, 0), (1, 1), (2, 2) AS t(c1, c2)
+          |""".stripMargin)
+      sql(
+        """
+          |CREATE TEMPORARY VIEW t2 AS
+          |WITH v as (
+          |  SELECT c1 + c1 c3 FROM t1
+          |)
+          |SELECT SUM(c3) s FROM v
+          |""".stripMargin)
+      sql(
+        """
+          |CACHE TABLE cache_nested_cte_table
+          |WITH
+          |v AS (
+          |  SELECT c1 * c2 c3 from t1
+          |)
+          |SELECT SUM(c3) FROM v
+          |EXCEPT
+          |SELECT s FROM t2
+          |""".stripMargin)
+
+      val df = sql("SELECT * FROM cache_nested_cte_table")
+
+      val inMemoryTableScan = collect(df.queryExecution.executedPlan) {
+        case i: InMemoryTableScanExec => i
+      }
+      assert(inMemoryTableScan.size == 1)
+      checkAnswer(df, Row(5) :: Nil)
+    }
+  }
+
   private def cacheManager = spark.sharedState.cacheManager
 
   private def pinTable(