diff --git a/src/installer/pkg/sfx/Microsoft.NETCore.App/Microsoft.NETCore.App.MonoCrossAOT.UnixFilePermissions.xml b/src/installer/pkg/sfx/Microsoft.NETCore.App/Microsoft.NETCore.App.MonoCrossAOT.UnixFilePermissions.xml
new file mode 100644
index 00000000000000..9437f7953f315a
--- /dev/null
+++ b/src/installer/pkg/sfx/Microsoft.NETCore.App/Microsoft.NETCore.App.MonoCrossAOT.UnixFilePermissions.xml
@@ -0,0 +1,5 @@
+<FileList>
+    <File Path="tools/mono-aot-cross" Permission="755" />
+    <File Path="tools/opt" Permission="755" />
+    <File Path="tools/llc" Permission="755" />
+</FileList>
diff --git a/src/installer/pkg/sfx/Microsoft.NETCore.App/Microsoft.NETCore.App.MonoCrossAOT.sfxproj b/src/installer/pkg/sfx/Microsoft.NETCore.App/Microsoft.NETCore.App.MonoCrossAOT.sfxproj
index 174cf76bb8cbab..3c0e7fac2d86b2 100644
--- a/src/installer/pkg/sfx/Microsoft.NETCore.App/Microsoft.NETCore.App.MonoCrossAOT.sfxproj
+++ b/src/installer/pkg/sfx/Microsoft.NETCore.App/Microsoft.NETCore.App.MonoCrossAOT.sfxproj
@@ -20,6 +20,7 @@
   <ItemGroup>
     <NativeRuntimeAsset Include="$(MonoAotCrossDir)$(TargetCrossRid)\**" TargetPath="tools/" />
     <NativeRuntimeAsset Include="$(MonoAotCrossDir)$(TargetCrossRid).Sdk.props" TargetPath="Sdk/Sdk.props" />
+    <NativeRuntimeAsset Condition="!$([MSBuild]::IsOsPlatform('Windows'))" Include="Microsoft.NETCore.App.MonoCrossAOT.UnixFilePermissions.xml" TargetPath="data/UnixFilePermissions.xml" />
   </ItemGroup>
 
   <Target Name="WriteAotSdkProps" BeforeTargets="ValidateProperties">