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ellipsometry.cpp
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183 lines (152 loc) · 4.9 KB
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#include "ellipsometry.h"
simulation_ellip::simulation_ellip(ifstream &m_file):simulation(m_file){
}
void simulation_ellip::get_psi_delta(void){
if (ref_vector_s.size()==0 || ref_vector_p.size()==0) {cout<<"please calculate the reflection first"<<endl;exit(1);}
psi_delta.clear();
psi.clear();
delta.clear();
for (size_t i=0;i<ref_vector_p.size();i++) {
complex<double> rho = ref_vector_p[i]/ref_vector_s[i];
psi_delta.push_back(rho);
psi.push_back(atan(abs(rho))/M_PI*180.0);
double delta_tmp = -arg(rho)/M_PI*180.0;
if (delta_tmp<-90) delta_tmp+=360;
delta.push_back(delta_tmp);
}
}
simulation_ellip::simulation_ellip(void){
}
void simulation_ellip::get_psi_delta(string filename){
ofstream myfile (filename.c_str());
if (ref_vector_s.size()==0 || ref_vector_p.size()==0) {cout<<"please calculate the reflection first"<<endl;exit(1);}
psi_delta.clear();
psi.clear();
delta.clear();
for (size_t i=0;i<ref_vector_p.size();i++) {
complex<double> rho = ref_vector_p[i]/ref_vector_s[i];
psi_delta.push_back(rho);
psi.push_back(atan(abs(rho))/M_PI*180.0);
double delta_tmp = -arg(rho)/M_PI*180.0;
if (delta_tmp<-90) delta_tmp+=360;
delta.push_back(delta_tmp);
myfile<<wav_vector[i]<<"\t"<<psi[i]<<"\t"<<delta[i]<<endl;
}
myfile.close();
}
ellipsometry::ellipsometry(ifstream &m_file){
int n_material, n_layer;
string filename;
double wav_begin,wav_end,npoint,aoi;
simulation_ellip* tmp_sim = new simulation_ellip(m_file);
fitted_data.push_back(tmp_sim);
int n_raw;
m_file>>n_raw;
cout<<endl<<endl<<"number of ellipsometry raw data is: "<<n_raw<<endl;
for (size_t i=0;i<n_raw;i++){
m_file>>filename;
double aoi;
raw_psi_delta* tmp_raw = new raw_psi_delta(filename,tmp_sim->wav_begin,tmp_sim->wav_end);
raw_data.push_back(tmp_raw);
m_file>>aoi;
tmp_raw->aoi = aoi;
if (i==0) {
fitted_data[i]->override_aoi(aoi);
fitted_data[i]->override_wav(tmp_raw->wav_vector.size(),tmp_raw->wav_vector);
}
else {
simulation_ellip* tmp_sim = new simulation_ellip();
*tmp_sim = *fitted_data[0];
fitted_data.push_back(tmp_sim);
fitted_data[i]->override_aoi(aoi);
fitted_data[i]->override_wav(tmp_raw->wav_vector.size(),tmp_raw->wav_vector);
}
}
cout<<endl<<endl;
for (size_t i=0;i<fitted_data[0]->layer_data.size();i++)
{
if (fitted_data[0]->layer_data[i]->is_variable())
{
cout<<"Add the thickness of layer "<<i+1<<" as a fitting parameter"<<endl;
vector<double> tmp(1,fitted_data[0]->layer_data[i]->get_thickness());
DOF* tmp_dof = new DOF(Layer,i,tmp);
fitting_parameters.push_back(tmp_dof);
parameters.push_back(fitted_data[0]->layer_data[i]->get_thickness());
}
}
}
void ellipsometry::delinearize_parameter(void){
fitting_parameters[0]->parameters[0] = parameters[0];
}
double ellipsometry::myfunc(const std::vector<double> &x, std::vector<double> &grad, void *data)
{
parameters = x;
delinearize_parameter();
for (size_t i = 0; i<fitting_parameters.size();i++) {
if (fitting_parameters[i]->type==Layer){
for (size_t j=0;j<fitted_data.size();j++){
fitted_data[j]->layer_data[fitting_parameters[i]->idx]->set_thickness(fitting_parameters[i]->parameters[0]);
}
}
}
for (size_t i = 0; i<fitted_data.size();i++) {
fitted_data[i]->get_ref_trans('s');
fitted_data[i]->get_ref_trans('p');
fitted_data[i]->get_psi_delta();
}
double error = get_error();
//cout<<x[0]<<" "<<error<<endl;
return error;
}
double ellipsometry::get_error()
{
double error = 0;
for (size_t i = 0 ;i<fitted_data.size();i++) {
for (size_t j = 0; j<raw_data[i]->wav_vector.size(); j++) {
error += (raw_data[i]->psi[j]-fitted_data[i]->psi[j])*(raw_data[i]->psi[j]-fitted_data[i]->psi[j]);
error += (raw_data[i]->delta[j]-fitted_data[i]->delta[j])*(raw_data[i]->delta[j]-fitted_data[i]->delta[j]);
}
}
return error;
}
void ellipsometry::fitting(void){
cout<<"enter"<<endl;
vector<double> x(1,1.4785);
vector<double> grad;
for (double t=1;t<2;t+=0.01)
{
x[0] =t;
cout<<t<<" "<<myfunc(x, grad, NULL)<<endl;
}
}
raw_psi_delta::raw_psi_delta(string filename,double begin,double end) {
ifstream data_in(filename.c_str());
if (!data_in.is_open()) {
cout<<"Cannot open file: "<<filename<<endl;
exit(1);
}
else
{
double wav,psi,delta;
while (data_in>>wav)
{
data_in>>psi;
data_in>>delta;
if (wav>=begin && wav<=end)
{
wav_vector.push_back(wav);
this->psi.push_back(psi);
this->delta.push_back(delta);
}
}
cout<<wav_vector.size()<<" data points have been read from "<<filename<<
" from "<<wav_vector[0]<<" nm to "<<wav_vector[wav_vector.size()-1]<<" nm"<<endl;
data_in.close();
}
}
DOF::DOF(dof_type type, int idx, vector<double> parameters)
{
this->type = type;
this->idx = idx;
this->parameters = parameters;
}